Ultra-precision laser micro-nano-machining is an accurate, flexible and controllable machining method applied to the fabrication of microelectronic devices, which is characterised by the realisation of laser-printed ZnO semiconductor structures with sub-micron precision and a minimum feature size of <1 μm.This new method of machining has been developed at the Suzhou Institute of Advanced Studies of the University of Science and Technology of China (USTC). Its main applications include:

1. Fabrication of microelectronic devices: Ultra-precision laser micro-nano-processing enables integrated laser direct writing of diodes, memristors and physically unrepeatable cryptographic circuits, providing a systematic new approach to the fabrication of complex, large-size, three-dimensional functional microelectronic devices.

2. manufacturing of optical devices: ultra-precision laser micro-nano processing can be used to manufacture optical devices, such as lenses, mirrors, etc., and its precision and quality can meet the needs of high-precision optical systems.

3. Biomedical field: Ultra-precision laser micromachining can be used to manufacture micro devices in the field of biomedicine, such as micro-sensors, micro-scalpels, etc., which can be used in medical diagnosis, treatment and surgery.

4. Aerospace field: ultra-precision laser micromachining can be used to manufacture micro devices in the field of aerospace, such as micro-engine, micro-satellite, etc. These devices can be used for high-precision control and measurement in the field of aerospace.

5. Energy field: ultra-precision laser micro-nano processing can be used to manufacture micro devices in the field of energy, such as micro-batteries, micro-solar cells, etc. These devices can be used in the field of energy efficient use and storage.

In short, ultra-precision laser micro-nano processing is a processing method with a wide range of prospects for its accuracy, flexibility and controllability for the manufacture of microelectronic devices, optical devices, biomedical devices, aerospace devices and energy devices and other fields provide new solutions.